GB50073-2001 National Standard Clean Plant Design Specification

GB 50073-2001 National Standard Clean Plant Design Specification

&; Lt; &; Lt; GB 500 -- 73-2001 National Standard Clean Plant Design Specification & amp; Gt; &; Gt; Specification for Clean Plant Design, GB 50073-2001

1 General provisions

1.0.1 Cleaner plants shall be designed to be technologically advanced, economical, safe, reliable and of good quality, and shall meet the requirements of energy conservation, occupational hygiene and environmental protection.

1.0.2 These specifications apply to the design of new, expanded and renovated clean plants.

1.0.3 The clean plant design shall create the necessary conditions for construction installation, maintenance management, overhaul testing and safe operation.

1.0.4 The clean plant design shall, in addition to being carried out in accordance with these specifications, conform to the existing mandatory national standards and norms.

2 Terminology

2.0.1 Clean room clean room

Room with controlled concentration of airborne particles. Its construction and use should reduce indoor trapping, generation and retention of particles. Other parameters such as temperature, humidity, pressure, etc. in the room are controlled as required.

2.0.2 Clean area clear zone

Capable space for controlled concentrations of airborne suspended particles. It should be constructed and used in such a way as to reduce the incidence, generation and retention of particles in space. Other relevant parameters in space such as temperature, humidity, pressure, etc. are controlled as required. Cleansing areas can be open or closed.

2.0.3 Mobile clean room clean house

A small cleaning room that can be moved in an integral position. There are two types of rigid or thin film enclosures.

2.0.4 Room for clean man room

A room that is purged according to certain procedures before entering a clean area.

2.0.5 Material purification room, room for room for cleaning

A room where materials are purged according to certain procedures before entering the cleaning area.

2.0.6 particle size

The response of the given particle size meter is equivalent to the equivalent sphere diameter of the measured particle. Equivalent optical diameters are used for discrete particle counting and light scattering instruments.

2.0.7 Airborne particles

Solid and liquid particles in the air with a size range of 0.1 to 5 μm for air cleanliness classification.

2.0.8 Ultra-microparticle ultraline particle

Particles with an equivalent diameter of less than 0.1 μm.

2.0.9 Microparticle macroprint

Particles with an equivalent diameter greater than 5 μm.

2.0.10 Particle size distribution

The frequency distribution and accumulation distribution of particle size are functions of particle size.

2.0.11 Dust concentration content

Number of suspended particles per unit volume of air.

2.0.12 Cleanness

The degree of cleanliness distinguished by the number of particles per unit volume of air.

2.0.13 Airflow air pad

The flow patterns and distribution of indoor air are designed reasonably.

2.0.14 One-way stream unidirectional stream

An airflow with parallel currents in a single direction and consistent wind speeds on a cross section.

2.0.15 Vertical unidirectional flow verticality stream

A unidirectional flow perpendicular to the horizontal plane.

2.0.16 Horizontal unidirectional flow

A one-way flow parallel to the horizontal plane.

2.0.17 Non-unidirectional stream

Air flow that does not meet the definition of one-way flow.

2.0.18 Mixed stream

A combination of unidirectional and non-unidirectional flows.

2.0.19 Clean working area

Refers to the area with a height of 0.8 to 1.5 m from the ground in the cleaning room(except for special requirements of the process).

2.0.20 Air shower

Use high speed clean air flow to blow off and clear the small room where the surface of the person entering the clean room is attached to the particles.

2.0.21 Air lock airlock

Set up in the clean room entrance, blocking outdoor or adjacent room pollution air flow and pressure difference control set buffer room.

2.0.22 Pass box

The opening of the delivery material and workmanship set up on the clean chamber wall. Both sides are equipped with Windows that can not be opened at the same time.

2.0.23 Clean workbench clean Bench

A worktable that maintains the cleanliness required for operating space.

2.0.24 Clean working clothes

A clean garment that produces less dust in order to limit the particles produced by the worker to a minimum.

2.0.25 Empty as-built

Facilities have been built, all power connections and operations, but no production equipment, materials and personnel.

2.0.26 Static at-rest

Facilities have been built, production equipment has been installed and operated as agreed by the owners and suppliers, but there are no production personnel.

2.0.27 Dynamic

The facility operates in a prescribed state, with specified personnel present and working under agreed conditions.

2.0.28 Leakage detection test grade test

Check the airtight test of air filters and their connection to the mounting frame.

2.0.29 High efficiency air filter HEPA(high quality air filter)

At rated winds, air filters with a trapping efficiency of 99.9 % or more for particles with a particle size greater than or equal to 0.3 μm and a flow resistance of less than 250 Pa.

2.0.30 Ultra efficient air filter ULPA

At rated winds, air filters with a trapping efficiency of more than 99.999 % for particles with a particle size of 0.1 to 0.2 μm and an airflow resistance of less than 280 Pa.

2.0.31 Pure water water

Water that is required for electrolyte impurities(often characterized by resistivity) and non-electrolyte impurities(such as particles, organic matter, bacteria, dissolved gases, etc.).

2.0.32 Antistatic environment ESD control environment

It is not easy to generate static electricity in a specific environment that can prevent electrostatic hazards. After static electricity is generated, it is easy to dissipate or eliminate, and electrostatic noise is difficult to spread.

2.0.33 Surface resistance surface resistance

The quotient of the DC voltage added between the two electrodes on the surface of the material and the steady state current flowing between the two poles.

2.0.34 Volume resistor volume-resistance

The quotient of the DC voltage between the two electrodes placed on the opposite surfaces of the material and the steady state current flowing between the two electrodes. The current does not include the current along the surface of the material.

2.0.35 Surface resistivity surface surface Esistivity

The quotient of DC field strength and steady current line density in the material surface layer. The dimension is Ω /.

2.0.36 volumetric resistivity volume-r Esistivity

The quotient of DC field strength and steady current density in the inner layer of the material. The dimension is Ω · cm.

2.0.37 Special fire escape firing access

Firefighters enter the dedicated entrance of the building to extinguish the fire. They are usually closed and opened by firefighters from outside when they are used.

2.0.38 Clean time clean time

After the cleaning room is contaminated, the purification air conditioning system begins to operate until it is restored to a stable specified indoor cleanliness level.

2.0.39 Bio-cleaning room biologal cleanroom

A limited space in which suspended microorganisms in clean room air are controlled within a specified value.

2.0.40 Plankton bacteria airborne viables

A colony suspended in the air.

2.0.41 Settlement bacteria colony forming office

The bacteria that landed on the Petri dish in the clean room.

3 Air Cleanliness Level

3.0.1 The level of cleanliness of suspended particles in the clean room and the air in the clean area shall be determined in Table 3.0.1.

3.0.2 The state of the air cleanliness level(empty, static, dynamic) shall be determined in consultation with the owner.

3.0.3 Test methods for air cleanliness are carried out in accordance with the requirements of Appendix C.

4 Overall design

4.1 Location selection and general layout of clean plant

4.1.1 The location of the clean plant shall be selected on the basis of the following requirements and after comparison with the technical and economic options:

1 Should be located in areas with low concentrations of dust and harmful gases in the atmosphere and where the natural environment is better.

2 Areas of serious air pollution, vibration or noise interference, such as railways, docks, airports, major traffic routes and factories, storage areas and yards that emit large amounts of dust and harmful gases, shall be kept away from them. If you can not stay away from serious air pollution sources, you should be on the windward side of the maximum frequency wind, or the windward side of the minimum frequency wind throughout the year.

3 Should be arranged in the plant environment clean, flow of people, logistics do not cross or less through the area.

4.1.2 For the location selection of the clean plant which has the requirement of micro-vibration control, the vibration impact of the existing vibration sources in the surrounding area shall be actually measured and determined after comparison with the analysis of the allowable vibration values of precision equipment and instruments.

4.1.3 The distance between the clean plant and the main road should be greater than 50m.

4.1.4 Ring fire lanes(accessible traffic roads) should be provided around the cleaning plant and, if difficult, fire lanes along the two long sides of the plant.

4.1.5 The pavement layer around the cleaning plant shall be made of materials of good overall performance and less dust.

4.1.6 Greening shall be carried out around the clean plant. Lawn can be planted, should not be planted harmful to the production of plants, and must not interfere with fire operations.

4.2 Integrated coordination of process layout and design

4.2.1 The process layout shall meet the following requirements:

The layout of the process should be reasonable and compact. The cleaning room or the cleaning area is only equipped with the necessary process equipment, as well as processes and studios that have the air cleanliness level requirements.

2 Under the premise of meeting the production process and noise requirements, the clean room or clean area with high air cleanliness should be close to the air conditioning room, and the process and studio with the same clean air level should be centrally arranged.

3 processes requiring high levels of air cleanliness in the cleaning room should be arranged on the upper wind side, and process equipment that is prone to pollution should be arranged near the airflow.

Transport routes for the installation and maintenance of large equipment should be considered and equipment installations and service ports should be reserved.

5 When there is frequent contact between different air cleanliness levels, measures to prevent pollution should be provided, such as buffer rooms, air lock rooms, transmission Windows, etc..

A separate material entrance should be set up. The material transfer route should be the shortest. The material must be cleaned before entering the cleaning area.

4.2.2 Plane and spatial design of the cleaning plant shall meet the requirements of the production process and the level of air cleanliness. Cleansing areas, personnel purification, material purification and other auxiliary rooms should be arranged in a zoning manner. At the same time, the integrated coordination of production operation, process equipment installation and maintenance, pipeline layout, airflow type and various technical facilities for purifying air conditioning system should be considered.

4.2.3 There shall be fewer compartments in the clean building, which shall be separated:

1 According to the fire risk classification of production, between the production sections of A and B and non-A and B, or with fire separation requirements.

2 Production links are small and often not between the two production segments used at the same time.

4.2.4 Priority shall be given to the requirements for the purification of air-conditioning systems for the layout of various fixed technical facilities(e.g. air outlets, Illuminators, air outlets, pipelines, etc.) in the clean plant, subject to the requirements of the production process and the level of air cleanliness.

4.3 Personnel and material purification

4.3.1 There shall be rooms and facilities for staff purification and material purification in the cleaning plant, as well as living rooms and other rooms as necessary.

4.3.2 The personnel purification and living rooms shall be set up as follows:

1 Personnel purification room should include rain gear storage, shoes change, management, clothing storage, cleaner work clothes and other rooms.

2 Other rooms such as toilets, toilets, showers, lounges, etc., as well as other rooms such as air shower rooms, airlock rooms, work clothes washing rooms, and drying rooms can be set up as needed.

4.3.3 Cleansing and living rooms shall be designed to meet the following requirements:

1 Shoe cleaning measures shall be taken at the entrance of the personnel purification room.

2 Save coat and cleaner work clothes should be set separately.

3 Cloth storage wardrobe should be set up according to the number of people designed, clean work clothes should be concentrated in the clean cabinet with air blowing.

Washing and drying facilities should be provided for washrooms.

The air blowing room shall be located at the entrance of the personnel in the clean area and adjacent to the dressing room of the clean work clothes. The single air blowing room is set up for each 30 people in the largest class. When there are more than 5 staff in the clean area, there should be a bypass door on the side of the air blowing room.

6 When it is a vertical one-way clean room above level 5, a gas gate room should be set up.

7 Toilets are not appropriate in the clean area. The toilet in the room used for personnel purification should have a front room.

4.3.4 The flow routes shall meet the following requirements:

1 The flow of people should avoid reciprocating.

2 The layout of the personnel purification room and the living room should be arranged according to the personnel purification procedure of Figure 4.3.4.

4.3.5 The floor area of the decontamination and living rooms in the plant shall be reasonably determined according to the level of air cleanliness and the number of staff. It is generally advisable to calculate the average number of people per person in the clean area. The level of air cleanliness in the dressing room of clean work clothes should be set at level 1 to 2 below the level of air cleanliness in the adjacent clean area.

4.3.6 The level of air cleanliness in the cleaning room of clean work clothes should not be lower than level 8.

4.3.7 Material purification rooms and facilities shall be set up according to the nature, shape and other characteristics of the equipment and materials at the entrance and exit of cleaning room equipment and materials. The layout of the material purification room should prevent the material from being contaminated during the transfer process after purification.

4.4 Noise control

4.4.1 Noise level(empty) in the cleaning room, non-one-way flow cleaning room should not be greater than 60dB(A), one-way flow, mixed flow cleaning room should not be greater than 65dB(A).

4.4.2 The frequency frequency acoustic pressure level shall be used to limit the noise spectrum in the cleaning room; The frequency band acoustic pressure levels should not be greater than those specified in Table 4.4.2.

4.4.3 Noise control requirements shall be taken into account in the design of the level and profile of the clean plant. The enclosure structure of clean room should have good sound insulation performance, and make each part of the sound insulation close to each other.

4.4.4 Low noise products shall be selected for all equipment in the cleaning room. For equipment where the radiation noise value exceeds the permitted value of the cleaning room, special sound isolation facilities(such as sound insulation, sound insulation, etc.) should be set up.

4.4.5 Control measures such as sound isolation, muffler and vibration isolation shall be taken when noise in the air conditioning system exceeds the allowed value. The exhaust system in the clean room should be designed to reduce noise in addition to accidental exhaust.

4.4.6 In the air conditioning system, according to the requirements of the noise level allowed in the room, the wind speed in the air duct should be selected according to the following regulations.

1 The total air duct is 6 to 10m/s.

2 The branch wind pipe without delivery and return air outlet is 4 to 6 m/s.

3 The branch wind pipe with a send and return air outlet is 2 to 5 m/s.

4.5 Microvibration Control

4.5.1 Clean plant design with micro-vibration control requirements should take into account:

1 In the structure selection, vibration isolation seam setting, the wall board and the ground and the roof connection, should be designed according to the micro-vibration control requirements.

2 Active vibration isolation measures should be taken for equipment with strong vibration in the cleaning room and surrounding auxiliary station rooms and their connecting pipes.

3 The comprehensive vibration effect of various vibration sources inside and outside the clean plant on the position of precision equipment and precision instruments in the clean factory should be determined to determine whether to adopt passive vibration isolation measures.

4.5.2 The allowable vibration values of precision equipment and instruments shall be provided by the manufacturing process and equipment manufacturing departments. When it is difficult for the production process and equipment manufacturing department to provide allowable vibration values, it can be performed with reference to GBJ22 of the isolation design specification.

4.5.3 The passive vibration isolation design of precision equipment and instruments shall meet the following conditions:

1 Vibration data of the comprehensive influence of the surrounding vibration source on it.

Type, specification and profile dimensions of equipment and instrumentation.

The quality, center position and moment of mass inertia of equipment and instrumentation.

The outer outline of the base of the equipment and instrument, the accessory device, the position of the pipeline, the size of the pits, trenches, holes, the foot bolts, and the position of the pre-buried pieces.

Requirements for leveling of equipment and instrumentation.

6 The allowable vibration value of equipment and instrumentation.

7 Technical parameters, dimensions and installation conditions of selected or designed vibration isolators or vibration isolators.

4.5.4 The passive vibration isolation design of precision equipment and instruments shall take into account:

1 stiffness of vibration isolation table.

2 Measures to correct the tilt of the vibration isolation platform due to changes in the quality and the position of the center of mass during the operation of equipment and instrumentation.

3 The damping ratio of the vibration isolation system shall not be less than 0.15.

The vibration isolation measures shall not affect the airflow type in the clean room.

4.5.5 Passive vibration isolation measures for precision equipment and instruments shall include air spring isolation devices that automatically correct tilt. The air source used to supply air Springs should be purified.

5 buildings

5.1 General provisions

5.1.1 The building layout and space layout of the clean plant shall be appropriately flexible. The main structure should adopt large space and long span column network, and should not adopt the load-bearing system of inner wall.

5.1.2 The material selection of the enclosure structure of the clean plant shall meet the requirements of heat preservation, heat insulation, fire prevention, moisture prevention, and less dust production.

5.1.3 The durability of the main structure of the clean plant shall be in harmony with the level of interior equipment and decoration and shall have fire protection, temperature deformation control and uneven subsidence performance. The deformation seam of the factory building should not pass through the clean area.

5.1.4 Technical mezzanine, technical chute or trench shall be arranged when the delivery, return duct and other pipeline are applied in darkness. When the vertical pipeline passing through the floor needs to be dark, a technical shaft should be set up, and its form, size, and structure should meet the requirements for the installation, overhaul, and fire prevention of the air duct, pipeline.

5.1.5 The layout and structural treatment of integrated plants with both general and cleaner production should avoid adverse effects on cleaner production in terms of flow of people, logistics, transportation and fire prevention.

5.2 Fire protection and evacuation

5.2.1 Refractory grade of clean plants shall not be lower than Grade II.

5.2.2 Fire hazards in the production workshop should be classified according to the existing National Standard for Fire Protection in Building Design(GBJ16). See Appendix A for an example of fire hazard classification in the workshop.

5.2.3 The clean plants produced by Class A and Class B should be single-storey, with a maximum allowable building area for fire protection zones, a single-storey factory building should be 3000 M2, and a multi-storey factory building should be 2000 M2. The maximum allowable building area of the fire protection zones of clean plants produced by C, D and E shall conform to the provisions of the existing national standard "Building Design Fire Protection Code"(GBJ16).

5.2.4 The roof and wall panels(including the core material) of the cleaning chamber shall be non-combustion bodies and organic composite materials shall not be used. The fire resistance limit of the roof should not be less than 0.4 H, and the fire resistance limit of the roof of the evacuation walkway should not be less than 1.0 H.

5.2.5 In an integrated plant in a fire prevention sub-zone, non-combustion isolation measures shall be provided between the cleaner production and the general production area. The fireproof limit of the wall and its corresponding ceiling shall not be less than 1 H, and the fireproof limit of the doors and Windows on the wall shall not be less than 0.6 H. The voids around the pipeline through the wall or ceiling shall be filled with fireproof or refractory materials.

5.2.6 The wall of the technical shaft shall be a non-combustion body with a fire resistance limit of not less than 1 H. The fire resistance limit of the inspection door on the well wall should not be less than 0.6 H; In each inner layer of the shaft or one layer of floor space, a non-combustion body equivalent to the fire resistance limit of the floor shall be used for horizontal fire separation; Through the horizontal fireproof pipeline around the gap, should use fireproof or fireproof material close fill.

5.2.7 The number of safe exits for each production floor, fire zone or clean area of a clean plant shall not be less than two, provided that one of the following requirements is met:

1 The total construction area of the clean area on each floor of the production plants of Group A and B does not exceed 50 M2, and the number of people producing at the same time does not exceed 5 people.

2 For C, D and E production plants, they should be set up in accordance with the provisions of the existing national standard "Building Design Fire Protection Code"(GBJ16).

5.2.8 The safe exits shall be dispersed and shall not be subjected to tortuous routes of personnel purification from the production site to the safe exits, and shall be accompanied by visible evacuation signs, and the safe evacuation distance shall be in accordance with the provisions of the existing national standard Fire Protection Code for Building Design(GBJ16).

5.2.9 Safety evacuation doors connecting the clean area to the non-clean area and the clean area to the outdoor area shall be opened in the direction of evacuation and closed doors shall be added. Safety evacuation doors should not use hanging doors, turnstiles, side sliding doors, curling doors and electronically controlled automatic doors.

5.2.10 The exterior walls of the clean building and the clean area should be equipped with Windows and doors for fire fighters to access the clean area of the factory. When the gap between the holes is greater than 80M, a dedicated fire exit should be set up at the appropriate part of the outer wall of the clean building.

The width of the dedicated fire escape should not be less than 750mm and the height should not be less than 1800mm, and there should be obvious signs. A balcony should be set up at the dedicated fire exit of the floor, and a steel ladder should be erected from the second floor to the upper floor.

5.2.11 Suspension doors, electronically controlled automatic doors and Windows less than 750mm wide and less than 1800mm high or fenced on the outer walls of a clean building shall not be used as entry points for fire fighters to enter the building in the event of a fire.

5.3 Interior Decoration

5.3.1 For the building enclosure and interior decoration of the cleaning plant, materials with good airtightness and with low deformation when temperature and humidity change should be selected.

5.3.2 Decoration of the walls and ceiling of the clean room shall meet the following requirements:

1 The surface of the clean room walls and ceiling shall be flat, smooth, dust-free, avoid glare, facilitate dust-removal, and should reduce concave and convex surfaces.

2 The kick should not protrude from the wall.

3 clean room should not be used to build a wall to dust the wall, when must be used timely drying operations, ash should be adopted high standards. After the wall should be painted with ash paint surface layer, and should be selected refractory, non-cracking, resistant to cleaning, smooth surface, not easy to absorb water spoil moldy paint.

5.3.3 The ground design of the cleaning room shall meet the following requirements:

1 Clean room ground should meet the production process requirements.

2 Clean room ground should be flat, wear-resistant, easy to clean, not easy to accumulate static electricity, avoid glare, do not crack.

3 Ground cushion should be reinforced, damp area cushion should be moisture-proof structure.

5.3.4 The walls and roof surfaces of the clean plant technical mezzanine shall be flat and smooth, and the technical mezzanine located underground shall be waterproof or moisture-proof and mildew proof.

5.3.5 The exterior window of the clean room(zone) shall be designed to meet the following requirements:

1 When the cleaning room(district) and the personnel purification room are set up with external Windows, double glass should be used to fix the Windows, and there should be good air tightness.

2 The window window on one side of the clean room should not be set up.

5.3.6 The closed door in the clean room shall be opened towards the room with a higher degree of air cleanliness and shall be provided with a closed door.

5.3.7 The design of clean room doors, Windows, walls, ceiling, etc. shall meet the following requirements:

1 The construction and construction crevices of clean room doors and Windows, walls, ceiling, floor(building) should all take reliable sealing measures.

2 When using a lightweight structure roof as a technical layer, maintenance channels should be set up in the sandwich.

3 The clean room window should be in line with the inner wall and should not be set up as a windowsill.

5.3.8 The colors in the cleaning room should be soft and elegant. The optical reflection coefficient of the indoor surface materials: the roof and wall should be 0.6 to 0.8, and the ground should be 0.15 to 0.35.

5.3.9 For cleaning rooms above level 8, lightweight wall panels and ceilings should be used.

5.3.10 The combustion properties of the selected decoration materials shall conform to the requirements of the existing national standard fire code for interior decoration design(GB 50222).

6 Air purification

6.1 General provisions

6.1.1 The level of air cleanliness in the cleaning rooms in the cleaning plant shall meet the requirements of the production process for the production environment.

6.1.2 Different types of airflow are selected according to the requirements of the level of air cleanliness.

6.1.3 The decontamination air conditioning system shall be provided separately in one of the following cases:

1 Different frequency or use time.

2 The substances or gases emitted by one process in the production process have an impact on the quality of products in other processes.

3 The requirements for temperature and humidity control vary greatly.

4 Purified air conditioning system and general air conditioning system.

6.1.4 The temperature and humidity range of the cleaning room shall meet the requirements of Table 6.1.4.

6.1.5 The maximum amount of fresh air in the clean room shall be:

1 The sum of the amount of fresh air needed to compensate for indoor exhaust and maintain the positive pressure in the room.

2 Ensure that the amount of fresh air per hour per person in the clean room is not less than 40 M3.

6.1.6 Cleansing of clean areas: Mobile efficient vacuum cleaners are generally appropriate; A centralized vacuum cleaner system should be set up for one-way flow cleaning rooms from level 1 to level 5. The vacuum suction system pipe in the cleaning room should be applied in darkness, and the dust suction mouth should be sealed and blocked.

6.2 Clean room pressure differential control

6.2.1 The pressure difference between the cleaning room and the surrounding space shall be maintained and shall be determined according to the production process requirements to maintain the positive or negative pressure difference.

6.2.2 The pressure difference between the clean room of different grades and between the clean area and the non-clean area shall not be less than 5 Pa and the pressure difference between the clean area and the outside area shall not be less than 10 Pa.

6.2.3 The amount of pressure difference air required to maintain different pressure difference values in the cleaning room shall be determined by the method of crevices or the method of number of ventilation according to the characteristics of the cleaning room.

6.2.4 Winding, winthing and exhaust systems shall be interlocked. The positive pressure clean room interlock procedure is to start the fan first, and then start the return fan and exhaust fan; When closing, the interlock procedure should be the opposite.

The negative pressure clean room interlock procedure is opposite to the above positive pressure clean room.

6.2.5 Non-continuously functioning cleaning rooms may be placed on duty for air supply according to production process requirements and shall be treated with purifying air conditioning.

6.3 Air flow type and air supply

6.3.1 The flow pattern shall be designed to meet the following requirements:

The airflow type shall meet the requirements of air cleanliness level. The level of air cleanliness is required to be 1 to 4, and vertical one-way flow should be used; The air cleanliness requirement is level 5. Vertical one-way flow or horizontal one-way flow should be used.

2 The air cleanliness requirement is 6 to 9 grades, and non-one-way flow should be used.

3 The airflow distribution of clean room work area should be uniform.

The flow rate of airflow in the clean room should meet the production process requirements.

6.3.2 The maximum of the following shall be taken for the air supply in the clean room:

1 To ensure the air cleanliness level of the air supply.

2 Ventilation calculated on the basis of heat and wet loads.

3 Fresh air supply to the clean room.

6.3.3 In order to ensure the air supply level of the air cleanliness level, calculations are made on the basis of the relevant data in table 6.3.3 or on the basis of indoor dust emission.

6.3.4 The layout of the facilities in the cleaning room shall take into account the effects on the flow pattern and air cleanliness, and shall meet the following requirements:

1 One-way flow cleaning room should not be arranged clean table; The air outlet of the non-one-way clean room should be far away from the clean table.

2 Process equipment that needs to be ventilated should be arranged on the side of the clean room.

3 When there is a heating device, measures should be taken to reduce the impact of the hot air flow on the distribution of the air flow.

The afterpressure valve should be arranged on the downwind side of the Clean air flow.

6.4 Air purification treatment

6.4.1 Air filters shall be selected, arranged and installed in such a manner as to meet the following requirements:

1 Air purification treatment should be based on the level of air cleanliness reasonable selection of air filters.

2 The air filter shall handle wind at a rate less than or equal to the rated wind.

The air filter should be set in the positive pressure section of the air conditioning system.

4 Subhigh efficiency and high efficiency air filters as terminal filters should be set at the end of the purified air conditioning system; Ultra efficient filters must be located at the end of the purified air conditioning system.

5 The resistance and efficiency of efficient(sub-efficient and ultra-efficient) air filters located in the same clean area should be similar.

6 Efficient(sub-efficient, ultra-efficient) air filters should be detected before installation, installation should be strict, installation should be simple, reliable, easy to detect leakage and replacement.

6.4.2 Concentration of air purification on new winds of air conditioning systems in larger clean plants is desirable.

6.4.3 Rewind shall be reasonably used in the design of the purified air conditioning system.

6.4.4 The fan of the air conditioning system shall adopt frequency conversion measures.

6.4.5 Electrical heaters and electric humidifiers for air conditioning systems shall be protected. New wind systems in cold areas should be protected against freezing.

6.5 Heating, ventilation and smoke prevention

6.5.1 Heat sinks shall not be used for cleaning rooms above level 8.

6.5.2 The process equipment for the production of dust and harmful gases in the cleaning chamber shall be provided with a local ventilation unit.

6.5.3 The local exhaust system shall be provided separately:

1 A mixture of exhaust media can produce or exacerbate corrosion, toxicity, risk of combustion explosion and cross-contamination.

2 The exhaust medium is toxic and non-toxic, and the toxicity is very different.

3 Flammable, explosive and general exhaust.

6.5.4 The following measures shall be taken in the design of the exhaust system of the clean room:

1 Prevention of outdoor backflow irrigation.

2 Fire and explosion protection containing flammable, explosive local exhaust system.

When the concentration and emissions of hazardous substances in the exhaust medium exceed the national or regional emission concentrations and emission regulations, harmless treatment shall be carried out.

4 For exhaust systems containing water vapor and condensing substances, slopes and discharge outlets shall be set.

6.5.5 Production support rooms such as shoes, clothing, toilet, toilet and shower shall be ventilated and the pressure in the room shall be lower than in the clean area.

6.5.6 Accident exhaust systems are installed according to production process requirements. The accident exhaust system should have automatic and manual control switches, and the manual control switches should be located in the clean room and the clean outdoor easy to operate.

6.5.7 Mechanical smoke prevention facilities shall be provided for the evacuation corridors of clean factories. The clean room mechanical smoke prevention system should be used in conjunction with ventilation and purification air-conditioning systems, but it must adopt reliable fire safety measures and should meet the requirements of the current national standard "Building Design Fire Protection Code"(GBJ16).

6.6 Wind ducts and accessories

6.6.1 Electric airtight valves and regulator valves shall be provided for the new air duct segment of the air conditioning system; Control valve should be installed in the feeding and returning pipe section; The exhaust system in the cleaning room shall be provided with a control valve, check valve or electric closed valve.

6.6.2 A fire valve shall be provided for the air duct of the ventilated and purified air conditioning system in one of the following cases:

1 The wind pipe passes through the partition wall of the fire prevention division and passes through the sides of the fire prevention partition wall of the deformation seam.

2 The air duct passes through the wall and floor of the ventilation and air conditioning room.

3 On the horizontal pipe section where the vertical wind pipe is connected with the horizontal wind pipe on each floor.

6.6.3 The materials and coatings for the production of air ducts and regulating valves for air conditioning systems, protection nets for highly efficient air filters, orifice plates, diffusion orifice plates, etc. shall be determined in accordance with the requirements of the cleanliness of the air transported and the conditions of the air environment in which it is located.

The production materials and coatings of air ducts and control valves, check valves, electric closed valves and other accessories of the air exhaust system in the clean room shall be determined according to the nature of the excluded gas and the air environment conditions in which it is located.

6.6.4 In the main air intake section of the Clean air conditioning system, the noise reduction measures shall be taken to meet the noise requirements of the clean room.

On the exhaust pipe of the purified air conditioning system or the exhaust pipe of the partial air drainage system, sound-reducing measures should be taken to meet the requirements of noise standards in the outdoor environment.

6.6.5 A pressure hole or differential gauge shall be provided before and after the air filter. In the new wind tube, send wind, wind back to the main section, the measurement hole should be set up.

6.6.6 The selection of air ducts, accessories and supporting materials shall meet the following requirements:

1 The air ducts of the air conditioning system and air exhaust system shall be made of non-combustible materials.

2 For air ducts that exclude corrosive gases, corrosion resistant flame resistant materials shall be used.

3 The air duct of the smoke exhaust system shall be made of non-combustible materials with a fire resistance limit greater than 0.5 H.

4 Accessories, insulation materials, muffler materials and binders are made of non-flammable or non-flammable materials.

7 Water supply and drainage

7.1 General provisions

7.1.1 Dry pipes for water supply and drainage in clean plants shall be laid in technical mezzanine or technical chute or may also be laid in the ground. Clean indoor pipes should be hidden, not relevant to the room through the pipeline.

7.1.2 Protective measures shall be taken when the outer surface of the pipeline may be exposed. The outer surface of the dew proof layer should be smooth and easy to clean, and must not cause pollution to the cleaning room.

7.1.3 Pipes shall be fitted with casings as they pass through the walls, floors and ceiling of the clean room, and reliable sealing measures shall be taken between the pipes and casings. Effective sealing measures should also be taken where the casing can not be set.

7.2 Water supply

7.2.1 The water supply system in the clean plant shall be set up in accordance with the requirements of water quality, water temperature, water pressure and water quantity for various uses, such as production, living and fire protection. The pipeline shall be designed with a margin to accommodate changes in the process.

7.2.2 Pure water supply pipes with high water quality requirements shall be recycled and shall meet the following requirements:

1 The amount of additional water in the cycle is 30 % to 100 % of the amount of water used.

2 Dry tube flow rate is 1.5 to 3 m/s.

3 The length of the non-cyclic branch pipe should be as short as possible, and its length should not exceed 6 times the diameter of the pipe.

4 There should be a cleaning port on the water supply dry pipe.

5 The components of the pipeline system must be sealed and there must be no gas seepage.

7.2.3 Pipe selection shall meet the following requirements:

1 The pipe of a pure water pipeline must meet the requirements of the production process for water quality, According to the need to choose stainless steel pipes and polyvinyl chloride(UPVC, CL-PVC), polypropylene(PP), acrylonitrile-butadiene-styrene(ABS), polyvinylidene fluoride(PVDF) and other pipes.

Cyclic cooling of water supply and return pipes for process equipment may include galvanized steel pipes, stainless steel pipes or engineering plastic pipes.

Pipe fittings shall be made of materials corresponding to the pipeline.

7.2.4 Cleaner outlets shall be reserved for pure water and cooling water pipes.

7.2.5 Water sprinklers shall be installed around the clean plant.

7.3 Drainage

7.3.1 Drainage systems shall be determined on the basis of characteristics such as the nature, concentration and quantity of wastewater discharged from the process equipment. Hazardous wastewater is treated with wastewater and discharged after meeting the National discharge standards.

7.3.2 Drainage equipment in the cleaning chamber and equipment connected to the gravity return pipe shall be fitted with a water seal at the following points of the outlet, and the drainage system shall be equipped with a complete breathable device.

7.3.3 Drainage facilities, such as ground leaks, in the cleaning room shall be provided in such a way as to meet the